LA3215C-UCC-CFT for the Supply of a Suite of Plasma Etcher and Plasma Deposition Tools, 4 Lots
Tenders are sought for the supply delivery, installation and commissioning of a suite of tools in 4 Lots for silicon-based and dielectric materials for University College Cork. The new plasma tools will enhance the capabilities at the Tyndall National Institute for the fabrication of semiconductor devices, especially silicon microelectronics and silicon MEMS, but also other materials such as germanium and silicon carbide. We invite proposals for the following lots; Lot 1 Plasma Etcher Silicon Dielectrics, advanced...
Buyer
Education Procurement Service (EPS)
Value
€3,300,000
Published
15 Jul 2026
Closes
31 Jul 2026
Procurement details
Source
TED (EU)
Region
IE052
Procurement method
Open
Category
Goods
Contract starts
Not provided
Contract ends
Not provided
CPV classifications
38000000
Laboratory, optical and precision equipments (excl. glasses)
Lots
Lot LOT-0001 Plasma Etcher ,Silicon ,Dielectrics
€3,300,000
Tenders are sought for the supply delivery, installation and commissioning of a suite of tools in 4 Lots for silicon-based and dielectric materials for University College Cork. The new plasma tools will enhance the capabilities at the Tyndall National Institute for the fabrication of semiconductor devices, especially silicon microelectronics and silicon MEMS...
Delivery: IE052 · Ireland
Lot LOT-0002 Plasma Etcher ,Metals ,Piezoelectrics
€3,300,000
Tenders are sought for the supply delivery, installation and commissioning of a suite of tools in 4 Lots for silicon-based and dielectric materials for University College Cork. The new plasma tools will enhance the capabilities at the Tyndall National Institute for the fabrication of semiconductor devices, especially silicon microelectronics and silicon MEMS...
Delivery: IE052 · Ireland
Lot LOT-0003 Plasma Etcher ,Slow and Controllable Rate ,Atomic Layer Etch for Silicon , Dielectrics
€3,300,000
Tenders are sought for the supply delivery, installation and commissioning of a suite of tools in 4 Lots for silicon-based and dielectric materials for University College Cork. The new plasma tools will enhance the capabilities at the Tyndall National Institute for the fabrication of semiconductor devices, especially silicon microelectronics and silicon MEMS...
Delivery: IE052 · Ireland
Lot LOT-0004 Plasma Deposition ,PECVD
€3,300,000
Tenders are sought for the supply delivery, installation and commissioning of a suite of tools in 4 Lots for silicon-based and dielectric materials for University College Cork. The new plasma tools will enhance the capabilities at the Tyndall National Institute for the fabrication of semiconductor devices, especially silicon microelectronics and silicon MEMS...
Delivery: IE052 · Ireland
Documents
Unlock document linkTED notice 488696-2026
15 Jul 2026
Tender notice · Web page
Procurement documents
Not provided
Bidding documents
TED notice 516095-2026
27 Jul 2026
Tender notice · Web page
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