Plasma enhanced chemical vapour deposition tool
THE SUBJECT OF THE PROCUREMENT The subject of the procurement is a plasma-enhanced automated cassette to cassette chemical vapor deposition (PECVD) system for deposition of dielectric thin films (SiO#, SiN, TEOS, SiON, a Si) for research and pilot line use in the VTT Micronova cleanroom. DIRECT AWARD, Article 40 2(2) of Finnish Procurement act (1397/2016) The procurement will be carried out as a direct award in accordance with 40 article Section 2(2) of the Finnish Public Procurement Act. According to the 40 § sect...
Buyer
Teknologian tutkimuskeskus VTT Oy
Value
Not provided
Published
7 Sept 2026
Closes
Not provided
Procurement details
Source
TED (EU)
Country
Finland (FI)
Procurement method
Limited
Category
Goods
Contract starts
Not provided
Contract ends
Not provided
CPV classifications
38000000
Laboratory, optical and precision equipments (excl. glasses)
Lots
Lot LOT-0000 Plasma enhanced chemical vapour deposition tool
Value not provided
THE SUBJECT OF THE PROCUREMENT The subject of the procurement is a plasma-enhanced automated cassette to cassette chemical vapor deposition (PECVD) system for deposition of dielectric thin films (SiO#, SiN, TEOS, SiON, a Si) for research and pilot line use in the VTT Micronova cleanroom. DIRECT AWARD, Article 40 2(2) of Finnish Procurement act (1397/2016) Th...
Delivery: anyw · Anywhere
Documents
Unlock document linkTED notice 615316-2026
7 Sept 2026
Award notice · Web page
Contains information from TED (Tenders Electronic Daily), © European Union, reused under CC BY 4.0.