Process Monitoring Tool
Upgrade of the existing process monitoring system mesc21-11 (Nanofocus topography measurement system serial number 700259) located at Fraunhofer IPMS CNT An der Bartlake 5. Upgrade cosists of an automatic handling system for wafers in a seperately enclosed environment. The system is capable of handling wafers from a SEMI 300 mm FOUP to the existing measurement tool. The system is also able to introduce 200 mm Wafers into a suitable adapter enabling processing on standard 300 mm tools and handle the 200 mm wafers in...
Buyer
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
Value
Not provided
Published
26 Aug 2026
Closes
Not provided
Procurement details
Source
TED (EU)
Country
Germany (DE)
Procurement method
Open
Category
Goods
Contract starts
Not provided
Contract ends
Not provided
CPV classifications
42990000
Miscellaneous special-purpose machinery
Lots
Lot LOT-0001 Process Monitoring Tool
Value not provided
Upgrade of the existing process monitoring system mesc21-11 (Nanofocus topography measurement system serial number 700259) located at Fraunhofer IPMS CNT An der Bartlake 5. Upgrade cosists of an automatic handling system for wafers in a seperately enclosed environment. The system is capable of handling wafers from a SEMI 300 mm FOUP to the existing measureme...
Delivery: DED21 · Germany
Documents
Unlock document linkTED notice 587209-2026
26 Aug 2026
Award notice · Web page
Contains information from TED (Tenders Electronic Daily), © European Union, reused under CC BY 4.0.