Integrated UHV Cluster for Pulsed Laser Deposition and Sputtering of Thin Films
The Laboratory of Inorganic Chemistry at ETH Zurich plans to procure an integrated UHV cluster for pulsed laser deposition and sputtering of heterostructures containing oxide and metallic layers. The system will enable materials synthesis on oxide substrates up to 10 x 10 mm2 in area. It shall comprise a PLD chamber, a sputtering chamber, a central UHV transfer/handling chamber, and a load-lock for sample and PLD target-carousel exchange without venting the process chambers. All chambers must have base pressures be...
Buyer
ETH Zürich - Abt. Procurement & Export Services
Value
€1,767,435
Published
2 Sept 2026
Closes
Not provided
Procurement details
Source
TED (EU)
Country
Switzerland (CH)
Procurement method
Open
Category
Goods
Contract starts
Not provided
Contract ends
Not provided
CPV classifications
38000000
Laboratory, optical and precision equipments (excl. glasses)
Lots
Lot LOT-0000 Integrated UHV Cluster for Pulsed Laser Deposition and Sputtering of Thin Films
€1,767,435
The Laboratory of Inorganic Chemistry at ETH Zurich plans to procure an integrated UHV cluster for pulsed laser deposition and sputtering of heterostructures containing oxide and metallic layers. The system will enable materials synthesis on oxide substrates up to 10 x 10 mm2 in area. It shall comprise a PLD chamber, a sputtering chamber, a central UHV trans...
Delivery: Zürich ETH Hönggerberg · CH040 · Switzerland
Documents
Unlock document linkTED notice 604227-2026
2 Sept 2026
Award notice · Web page
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