2022-23/ 2691 Supply of specialist gas lines and backing lines for four dry etch and deposition systems
The Leeds Nanotechnology Cleanroom at the University of Leeds has recently ordered four dry etch/ deposition systems due for delivery in Feb/March 2024. Each tool requires the installation of gas lines for UHP specialist gases.
Buyer
UNIVERSITY OF LEEDS
Value
£210,000
Published
31 Jul 2023
Closes
30 Aug 2023
Procurement details
Source
Find a Tender
Region
Leeds
Procurement method
Selective
Category
Works
Contract starts
Not provided
Contract ends
Not provided
CPV classifications
45214630
Scientific installations
Lots
Lot 1 2022-23/ 2691 Supply of specialist gas lines and backing lines for four dry etch and deposition systems
Value not provided
The Leeds Nanotechnology Cleanroom at the University of Leeds has recently ordered four dry etch/ deposition systems due for delivery in Feb/March 2024, including a deep-reactive ion etcher, ICP-RIE, ICP-CVD, and open-load RIE. Each tool requires the installation of gas lines for UHP specialist gases.
Delivery: Leeds
Documents
No document metadata is available for this public record.
Contains public sector information licensed under the Open Government Licence v3.0.