Provision of a 200mm High Performance Electron Beam Lithography System
The University is looking to procure a new 200mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide state-of-the-art nanometer scale lithography service.
Buyer
UNIVERSITY OF SOUTHAMPTON
Value
£5,000,000
Published
17 Jan 2023
Closes
28 Sept 2022
Procurement details
Source
Find a Tender
Region
Southampton
Procurement method
Open
Category
Goods
Contract starts
Not provided
Contract ends
Not provided
CPV classifications
38000000
Laboratory, optical and precision equipments (excl. glasses)
Lots
Lot 1 Provision of a 200mm High Performance Electron Beam Lithography System
£5,000,000
The Southampton Nanofabrication Centre is a state-of-the-art facility for microfabrication and high-spec nanofabrication, as well as a wide range of characterisation capabilities, housed in a purpose built, 820m2 cleanroom in the Mountbatten Complex at the University of Southampton. One of the premier cleanrooms in Europe, the Centre has a uniquely broad ran...
Delivery: South East (England)
Documents
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