Supply of one off Reactive Ion Etcher (RIE) and/or a one off Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE) in two lots.

The Device Fabrication Small Research Facility (SRF) currently has one reactive ion etcher (RIE) and two inductively coupled plasma reactive ion etchers (ICPRIE), serving a wide range of research and industrial customers from across the University and nationally. The SRF is capable of manufacturing semiconductor devices via a range of standard processes, working alongside our Epitaxy facility growing advanced semiconductor materials. Our research portfolio in these areas is in excess of £50million. Quotations are r...