Ultra-High Resolution Scanning thermal probe nanolithography with hybrid micro-nanolithography & 3D lithography capabilities

Ultra-High Resolution Scanning thermal probe nanolithography with hybrid micro-nanolithography & 3D lithography capabilities. The AFM/thermal lithography system will enable patterning physical and chemical features with the nanoscale resolution, which is decisive for molecular devices and 2D-material devices. In addition, the integration of AFM, laser writing and thermal imaging has the potential for the development of new experimental techniques on correlation aspects of scanning based nanoscopy.