Hydrogen generation system for semiconductor manufacture

The National Epitaxy Facility (NEF) at the University of Sheffield is a nationally important supplier of semiconductor materials for research and development in Universities and industry across the UK. A reliable supply of high purity hydrogen is key to the work of the NEF and our other research groups in semiconductor production. Our existing PEM-based hydrogen generation system is approaching end of life and a replacement system is required. Our hydrogen supply operates at 30 bar and a peak mass flow rate of appr...