Supply of a Plasma Etch Tool for Silicon Carbide (SiC) Etching
This Tender Specification is for the supply and delivery of a Plasma Etch Tool for SiC etching. In procuring this system, the University is seeking to augment its well-established existing plasma etch and deposition tool set, expanding the capabilities that the CISM will be able to provide. The new tool will be of strategic importance in delivering both frontside SiC etch capability for power MOSFET trench applications, and backside SiC via etch capability for GaN-on-SiC device applications. Reliability of the equi...
Buyer
Swansea University
Value
£1,000,000
Published
21 Jun 2021
Closes
18 Mar 2021
Procurement details
Source
Find a Tender
Region
Swansea
Procurement method
Open
Category
Goods
Contract starts
Not provided
Contract ends
Not provided
CPV classifications
38000000
Laboratory, optical and precision equipments (excl. glasses)
38900000
Miscellaneous evaluation or testing instruments
38970000
Research, testing and scientific technical simulator
39180000
Laboratory furniture
Lots
Lot 1 Supply of a Plasma Etch Tool for Silicon Carbide (SiC) Etching
£1,000,000
This Tender Specification is for the supply and delivery of a Plasma Etch Tool for SiC etching. In procuring this system, the University is seeking to augment its well-established existing plasma etch and deposition tool set, expanding the capabilities that the CISM will be able to provide. The new tool will be of strategic importance in delivering both fron...
Delivery: Wales
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