200mm High Performance Electron Beam Lithography System

The University is looking to procure a new 200mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide a state-of-the-art nanometer scale lithography service. The user base for the new instrument will be approximately 40 users. Tenders or requests to participate must be submitted electronically via the University's electronic tendering portal, In Tend, found at the following a...