RFQ - Profilometer for sputter crater depth measurement

NPL requires a stylus profilometer to measure the sputter crater depth for X-ray Photoelectron spectroscopy and secondary ion mass spectrometry metrology work. Sputter craters are typically in the range of (1000 µm x 1000 µm) to (100 µm x 100 µm) and with depths from 10 µm to 100 nm. The sample often has high reflectivity (e.g. silver thin film or silicon wafer) and so a stylus profilometer rather than an optical profilometer is required. Detailed specifications are provided in section 2.2 and 2.3. In addition...