Atomic Layer Deposition System

The Purchaser is inviting tenders on the terms set out in this further competition for the supply, delivery and installation of an Atomic Layer Deposition (ALD) system. The ALD will be placed in the Quantum Technology Centre (QTC) cleanrooms located in the Physics Department at Lancaster University. It will significantly enhance and complement the existing cleanroom facilities that include photo- and e-beam lithography, chemical wet etching, inductively coupled plasma (ICP) and reactive ion-etching (RIE), plasma-en...