202122/547 Supply of up to four dry etch and deposition systems
NOTICE OF AWARD OF four dry etch and deposition systems, specifically: â¢A Deep-Silicon Reactive Ion Etcher (D-RIE) â¢An Inductively Coupled Plasma-RIE (ICP-RIE) â¢A parallel plate RIE â¢A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)
Buyer
UNIVERSITY OF LEEDS
Value
£2,155,581
Published
24 Aug 2023
Closes
25 May 2023
Procurement details
Source
Contracts Finder
Region
Leeds
Procurement method
Selective
Category
Goods
Contract starts
10 Dec 2023
Contract ends
10 Dec 2026
CPV classifications
22520000
Dry-etching equipment
Lots
Lot default 202122/547 Supply of up to four dry etch and deposition systems
£2,155,581
NOTICE OF AWARD OF four dry etch and deposition systems, specifically: â¢A Deep-Silicon Reactive Ion Etcher (D-RIE) â¢An Inductively Coupled Plasma-RIE (ICP-RIE) â¢A parallel plate RIE â¢A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)
Delivery: Yorkshire and the Humber · United Kingdom, Yorkshire and the Humber, United Kingdom
Documents
Unlock document linkAwarded contract notice on Contracts Finder
24 Aug 2023
Awarded contract notice on Contracts Finder
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Tender notice
Contains public sector information licensed under the Open Government Licence v3.0.