Supply, Installation and Commissioning of an Integrated Glovebox for the Beneq TFS500 ALD Tool

This contract is for the supply, installation, delivery and commissioning of an integrated glovebox for the Beneq TFS500 ALD Tool, with the option to include a substrate transportation box and a vacuum oven/antechamber. The glovebox will be integrated with the existing Beneq TFS500 ALD Tool and it's required for loading/unloading of substrates/samples up to 12" diameter in a pressure controlled inert environment. The scope of this tender includes the full lifecycle costs for this equipment, including but not limite...