Open Tenderocds-b5fd17-9ec2cb51-018e-4038-bfb0-6ad434a92fce

202122/547 Supply of up to four dry etch and deposition systems

The University of Leeds is seeking tenders for four dry etch and deposition systems, specifically: •A Deep-Silicon Reactive Ion Etcher (D-RIE) •An Inductively Coupled Plasma-RIE (ICP-RIE) •A parallel plate RIE •A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)

Buyer

UNIVERSITY OF LEEDS

Value

£25,000,000

Published

15 Feb 2022

Closes

16 Mar 2022

Procurement details

Source

Contracts Finder

Region

Leeds

Procurement method

Selective

Category

Goods

Contract starts

Not provided

Contract ends

Not provided

CPV classifications

22520000

Dry-etching equipment

Lots

Lot default 202122/547 Supply of up to four dry etch and deposition systems

£25,000,000

The University of Leeds is seeking tenders for four dry etch and deposition systems, specifically: •A Deep-Silicon Reactive Ion Etcher (D-RIE) •An Inductively Coupled Plasma-RIE (ICP-RIE) •A parallel plate RIE •A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)

Delivery: Yorkshire and the Humber · United Kingdom, Yorkshire and the Humber, United Kingdom

Opportunity notice on Contracts Finder

15 Feb 2022

Opportunity notice on Contracts Finder

Tender notice · Web page

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Tender notice

Contains public sector information licensed under the Open Government Licence v3.0.