Ultra-High Resolution Scanning thermal probe nanolithography with hybrid micro-nanolithography & 3D lithography capabilities. 2

Ultra-High Resolution Scanning thermal probe nanolithography with hybrid micro-nanolithography & 3D lithography capabilities. The AFM/thermal lithography system will enable patterning physical and chemical features with the nanoscale resolution, which is decisive for molecular devices and 2D-material devices. In addition, the integration of AFM, laser writing and thermal imaging has the potential for the development of new experimental techniques on correlation aspects of scanning based nanoscopy. The proposed plat...