Installation of Clean Rooms for Physics Laboratories at Royal Holloway, University of London

The Physics Department of Royal Holloway, University of London have won a grant from the Engineering and Physical Sciences Research Council (EPSRC) for the purchase of an Electron Beam Lithography Tool which will be located within a new 300 m2 specialist multi-room cleanroom environment to be constructed in an existing building. The facility will underpin the UK Centre for Superconducting Quantum Systems. The new cleanroom facility will provide a reliable ISO Class 5 environment for electronic nanofabrication of de...