Laser microlithography equipment

The University of Salford is looking to procure laser microlithography equipment that satisfies the following technical requirements: • Be able to use ultraviolet light to create bespoke patterns on the surface of a wafer or chip • Be able to handle small chips in addition to full sized wafers • Be able to write large blocks of areas in one exposure (for example using a MEMS micromirror array). This means that laser lithography systems that use a single focused laser beam to write patterns pixel by pixel are...