Prior Information Notice - Imaging System for Device Metrology

The National Physical Laboratory [NPL] requirement is for a microscope to be used for imaging and dimensional measurements of microfabricated quantum devices. The microscope will be installed inside the SuperFab cleanroom at Royal Holloway, University of London. The microscope will be used both for imaging throughout the fabrication process, and for measuring the dimensions of completed devices and features. Primarily, the microscope will be used with samples comprising thin-films (metals and dielectrics) deposited...