Imaging Ellipsometer_ITT990

One imaging spectroscopic ellipsometer capable of providing information on the thickness and optical properties (over a range of wavelengths, at least 250nm to 1000nm) of thin regions on planar substrates. A key specification for this instrument is the lateral ellipsometric resolution. We already have a high quality spectroscopic ellipsometer on-site which has a minimum spot-size around 250 microns in diameter. We now wish to improve the lateral resolution of our ellipsometry measurements to the micron-scale. We wa...